download process

Hf-Based High-k Dielectrics: Process Development, Performance Characterization, and Reliability - , Jack C. Lee

Instant Download
Price:
35.00
USD

ePub format - non-refundable!



Instant Download from ebook-reader, digital version

Pay for Hf-Based High-k Dielectrics: Process Development, Performance Characterization, and Reliability - , Jack C. Lee
Provided by
ingram
Adode Digital Editions format only - **non-refundable**

Works on PC, Mac and modern smartphones and tablets!
  1. Create an Adobe account.
  2. Install/update Adobe Digital Edition.
  3. Buy this book on TRADEBIT.COM.
    See the How-To!
  4. **non-refundable**

Standard iOS and Android reader apps work, too!
3.167 MB File

In this work, the reliability of HfO2 (hafnium oxide) with poly gate and dual metal gate electrode (Ru-Ta alloy, Ru) was investigated. Hard breakdown and soft breakdown, particularly the Weibull slopes, were studied under constant voltage stress. Dynamic stressing has also been used. It was found that the combination of trapping and detrapping contributed to the enhancement of the projected lifetime. The results from the polarity dependence studies showed that the substrate injection exhibited a shorter projected lifetime and worse soft breakdown behavior, compared to the gate injection. The origin of soft breakdown (first breakdown) was studied and the results suggested that the soft breakdown may be due to one layer breakdown in the bilayer structure (HfO2/SiO2: 4 nm/4 nm). Low Weibull slope was in part attributed to the lower barrier height of HfO2 at the interface layer. Interface layer optimization was conducted in terms of mobility, swing, and short channel effect using deep submicron MOSFET devices.

Author: Kim, Young-Hee
Author: Lee, Jack C.
Publisher: Morgan & Claypool Publishers
Illustration: n
Language: ENG
Title: Hf-Based High-k Dielectrics: Process Development, Performance Characterization, and Reliability
Pages: 00000 (Encrypted PDF)
On Sale: 2006-01-01
SKU-13/ISBN: 9781598290042
Category: Technology & Engineering : General
Category: Science : Physics - Electricity
Category: Science : Physics - Electromagnetism


(ID 110043677)

File Data:

Contact Seller:
ebook-reader, US, Member since 09/08/2010

URL:

Embed:
Create JavaScript Mobile Tag Widgets for your homepage

Resell product:

Product video:

More Files From This User

Related Files


Tradebit Reviews

Tradebit is the worlds largest marketplace for digital files, with over 2.5 million satisfied customers and millions of digital products. Online for over 12 years, Tradebit is the best place to find files like music, video tutorials, repair manuals, and more. If you're curious about how much our users love Tradebit, read reviews from real buyers!